CORNERSTONE Multi Project Wafer Run 3 Announced
The design rules for CORNERSTONE multi project wafer (MPW) run 3 have been announced. The platform is 500 nm Si / 3 µm buried oxide (BOX) silicon-on-insulator (SOI). There will be 2 silicon etches of 160 nm (grating couplers) and 500 nm (strip waveguides).
More information on this run can be found here.
The mask submission deadline is Friday 28th July.