DUV Lithography Job Request Form

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updated 1:14 PM UTC, Jun 29, 2022

Events:

June 2022: CORNERSTONE @ PIC International Conference

Please use this form to request access to CORNERSTONE's DUV lithography service.

For help in completing this form, download our guidance document.

DUV Lithography Job Request Form Guidance

User Details

Name*

Email address*

Company*

Telephone number*

Shipping address*

Design Details

How many wafers do you require?*

What is your substrate?*

Please list all materials and approximate thicknesses in your layer stack on the substrate*

Will you provide the wafers?* I will provide the wafers
I need you to supply the wafers

Please confirm that the wafers have not been processed in any tools that also process copper or gold*

Please select the required resist thickness* 680 nm
1 um
1.3 um

What is the title of the reticle to expose?*

What specification of reticle do you require?* Standard without pellicle
High without pellicle
Ultra-High without pellicle
Standard with pellicle
High with pellicle
Ultra-high with pellicle
The reticle has already been ordered

Which parts of the reticle should be exposed?*

What is the shot x-pitch on the wafer (mm)?*

What is the shot y-pitch on the wafer (mm)?*

If the exposure dose you require is known, please enter it here

Please specify the critical dimension*

What is the nature of the critical dimension?* Trench
Resist feature

Please supply the coordinates of the critical dimension in the GDS file*

What do you require at the centre of the wafer?* Centre of shot (odd-odd shot map)
Middle line of X and gap between Y (odd-even shot map)
Middle line of Y and gap between X (even-odd shot map)
Gap between both X&Y (even-even shot map)
Other (give details in comments)

Do you require alignment or is this a first print job?* Alignment required
First print job

Alignment Information

Only complete this section if alignment to layers already patterned on the wafer/s is required

Please enter the coordinates of the alignment marks on the wafer

Is the centre of the design at the centre of the shot? Yes
No (please add details in the comments below)

Is there any rotation relative to the wafer notch? Yes (please add details in the comments below)
No

What is at the centre of the wafer on the layers you want to align to? Centre of shot (odd-odd shot map)
Middle line of X and gap between Y (odd-even shot map)
Middle line of Y and gap between X (even-odd shot map)
Gap between both X&Y (even-even shot map)
Other (give details in comments)

Payment Information

Please upload your purchase order*

I agree to the Terms and Conditions and I am authorised by my Organisation to do so*

Do you have any comments?

Thank you for your submission. A member of the CORNERSTONE team will be in touch shortly.

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